This study presents a finite element approach of a numerical model to investigate the profile of the deformed sprayed particles and the compressive residual stresses analysis at the interfacial zone of particle and substrate impact using cold gas dynamic spray (CGDS). The Lagrangian approach was used to analyze, in details, the material deformation behavior during impact, contact problems of single-particle impact process and the outputs of equivalent plastic strain and temperature to achieve a qualitative understanding of cold gas dynamic spray contact process of cold sprayed particle on the substrate. The evolution of residual compressive stresses during impact was also analyzed for multiple-particles impact process using the Lagrangian approach. It can be observed that the compressive residual stresses increase by increasing the preheating temperature and particle initial impact velocity.