Mode I and mode II stress intensity factors (SIFs) through the thickness of edge crack in semi circular bend (SCB) and center cracked circular disc (CCCD) specimens have been analyzed using three dimensional finite element analysis. The effect of the CCCD and SCB specimen thickness on the through-thickness variations of SIFs has been studied. For all mode of mixity, the peak value of mode I SIF is found at mid plane of SCB specimen and for thin CCCD specimen, while, this location is shifted to be near the free surface plane in thick CCCD specimen. The variation of mode II SIF in CCCD and SCB specimens have a similar trend.